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STMicroelectronics offers high-accuracy MEMS sensors

May 10, 2018  - By
Image: GPS World

STMicroelectronics is offering new high-stability MEMS sensors for the Industrial Internet of Things (IIoT).

The new sensors, to be made available sometime this year, begin with the IIS3DHHC, a 3-axis accelerometer optimized for high measurement resolution and stability to ensure accuracy over time and temperature.

The IIS3DHHC targets precision inclinometers in antenna-positioning mechanisms for communication systems, Structural Health Monitoring (SHM) equipment for keeping buildings and bridges safe, and stabilizers or levelers for a wide variety of industrial platforms.

Its long-term accuracy and robustness are also suitable for high-sensitivity tilt and security sensors, as well as image stabilization in high-end digital still cameras (DSCs), the company said.

STMicroelectronics also provides what it calls “product longevity” to assure long-term availability of components in industrial equipment.

The IIS3DHHC has a full scale of ±2.5 g and is capable of providing the measured accelerations to the application through an SPI 4-wire digital interface.

The sensing element is manufactured using a dedicated micromachining process developed by STMicroelectronics to produce inertial sensors and actuators on silicon wafers.

The IC interface is manufactured using a CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the characteristics of the sensing element.

The IIS3DHHC is available in a high-performance (low-stress) ceramic cavity land grid array (CC LGA) package and can operate within a temperature range of -40 degrees Celsius to +85 degrees Celsius.

Key Features of the IIS3DHHC

  • Included in the 10-year longevity program
  • 3-axis, ±2.5 g full-scale
  • Ultra-low noise performance: 45 µg/√Hz
  • Excellent stability over temperature (<0.4 mg/°C) and time
  • 16-bit data output
  • SPI 4-wire digital output interface
  • Embedded FIFO (depth 32 levels)
  • Embedded temperature sensor
  • 12-bit temperature data output
  • High shock survivability
  • Extended operating temperature range (-40 °C to +85 °C)
  • ECOPACK, RoHS and “Green” compliant

“These high-quality industrial sensors leverage our investments in MEMS design and high-yield fabrication processes to deliver superior performance with low ownership costs for applications where the highest precision, repeatability and robustness are critical,” said Andrea Onetti, group VP and general manager, MEMS Sensors Division, STMicroelectronics. “We will continue to introduce new types of precision sensors for industrial applications in the coming months, covered by our 10-year longevity commitment, including combination sensors, specialized sensors and complete inertial modules.”

The IIS3DHHC is in production now, in a high-quality 16-lead 5 mm x 5 mm x 1.7 mm ceramic LGA package, priced from $4.50 for orders of 1000 pieces.


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About the Author: Tracy Cozzens

Senior Editor Tracy Cozzens joined GPS World magazine in 2006. She also is editor of GPS World’s newsletters and the sister website Geospatial Solutions. She has worked in government, for non-profits, and in corporate communications, editing a variety of publications for audiences ranging from federal government contractors to teachers.